A Simple Sputter Yield Calculator

Blue fields allow input; press <TAB> or <RETURN> to calculate.

Based on empirical equations for sputter yields at normal incidence by N. Matsunami, Y. Yamamura, Y. Itikawa, N. Itoh, Y. Kazumata, S. Miyagawa, K. Morita, R. Shimizu, and H. Tawara, in Energy Dependence of the Yields of Ion-Induced Sputtering of Monatomic Solids, IPPJ-AM-32 (Institute of Plasma Physics, Nagoya University, Japan, 1983).

NOTE: Data for target materials Zn, Cd and Pb have a lower accuracy than the others. Also projectile-target combinations that result in modifications of the target will lead to low accuracy.

surface/sputteryield.txt · Last modified: 2023-10-16 21:44 (external edit)

INPUT:
	Target
	Projectile
	Energy E	eV
OUTPUT:
	Energy Threshold	eV
	Sputter Yield Y

CREATE A TABLE:
	Start Energy E1	eV
	Stop Energy E2	eV
	Energy Step	eV
	Delimiter