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The MBE Machine

The MBE machine is an ultrahigh vacuum system based on a setup acquired from Specs (hence, also named Specs machine) with a preparation chamber optimized for growth of thin films. Besides a sample manipulator with electron beam heater, ion source for sputtering, evaporators, and a quartz crystal microbalance, the preparation chamber also houses an oxygen plasma source. The analysis chamber is equipped with XPS, LEED and a variable-temperature STM.

The MBE machine

surface/mbe_machine.1314187889.txt.gz · Last modified: 2011-08-24 14:11 by Michael Schmid