A Simple Sputter Yield Calculator

INPUT:
Target
Projectile
Energy E= eV


OUTPUT:    
Energy Threshold= eV
Sputter Yield Y=

CREATE A TABLE:    
Start Energy E1= eV
Stop Energy E2= eV
Energy Step= eV
Delimiter:



Based on empirical equations for sputter yields at normal incidence by N. Matsunami, Y. Yamamura, Y. Itikawa, N. Itoh, Y. Kazumata, S. Miyagawa, K. Morita, R. Shimizu, and H. Tawara, in Energy Dependence of the Yields of Ion-Induced Sputtering of Monatomic Solids, IPPJ-AM-32 (Institute of Plasma Physics, Nagoya University, Japan, 1983).

NOTE: Data for target materials Zn, Cd and Pb have a lower accuracy than the others. Also projectile-target combinations that result in modifications of the target will lead to low accuracy.

Copyright © by Michael Schmid, IAP/TU Wien Surface Physics Group 2006-2009.