The maximum entropy approach is applied to restore and sharpen scanning tunneling microscopy (STM) images with atomic resolution. Based on the STM theory of Tersoff and Hamann the process of data acquisition can be approximated by the convolution of a localized atomic density of states (i.e. narrow spots in the reconstruction) of the sample and a Gaussian resolution function which limits the resolution. In STM practice a good and robust estimation of the atomic core positions is necessary for different reasons, such as to be able to calculate the characteristics of the atomic lattice or to study non-periodicities.
Corresponding author: H. Störi. Reprints also available from M. Schmid (schmid).