The total sputter yield of LiF induced by singly charged hyperthermal He+, Ne+ and Ar+ ions of a kinetic energy of 5-500 eV is presented. The measurements have been performed with a highly sensitive quartz crystal microbalance. Results of the total sputter yield of Au show excellent agreement with the literature. The results on LiF show a high, slowly decreasing total sputter yield at low energies. This fact is interpreted as evidence for electronic processes in the sputtering of LiF.
Corresponding author: P. Varga (varga).
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