Ionization of LiF by hyperthermal multiply charged ions

T. Neidhart, M. Schmid and P. Varga

Institut für Allgemeine Physik, Technische Universität Wien, A-1040 Wien, Austria

Ionization of Solids by Heavy Particles
Ed. R.A. Baragiola (Plenum Press, New York 1993) pp. 447-453

Sputtering of a LiF thin film (0.25 µm) surface by singly- (He+, Ne+ and Ar+) and doubly-charged (Ne++ and Ar++) ions with impact energies between 10 and 500 eV has been performed. The yield of sputtered Li+ and F- ions is only slightly higher for doubly-charged ions compared to singly-charged projectiles at impact energies below 100 eV, whereas the F+ yield is substantially increased if doubly-charged projectiles are used. The experimental data are explained within the framework of a model based on calculations by Walkup and Avouris. A comparison is given with former measurements on a LiF single crystal.

Corresponding author: P. Varga (varga< encoded email address >).